CPC H01L 29/401 (2013.01) [H01L 29/518 (2013.01); H01L 29/6634 (2013.01)] | 14 Claims |
1. A device, comprising:
a substrate having a first surface, the substrate including:
a first extension of the substrate that extends away from the first surface, sidewalls of the first extension are tapered, the first extension having a second surface;
a first portion of an insulating layer on the second surface of the first extension, wherein the first portion of the insulating layer includes an undercut;
a first portion of a silicon nitride layer on the first portion of the insulating layer, sidewalls of the first portion of the silicon nitride layer are tapered.
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