US 11,817,466 B2
Photoelectric conversion element, photodetector, photodetection system, electronic apparatus, and mobile body
Hideaki Togashi, Kanagawa (JP); Tetsuji Yamaguchi, Kanagawa (JP); Nobuhiro Kawai, Kanagawa (JP); Koji Sekiguchi, Kanagawa (JP); Masahiro Joei, Kanagawa (JP); Kenichi Murata, Kanagawa (JP); Shintarou Hirata, Kanagawa (JP); Yuta Hasegawa, Kanagawa (JP); and Yoshito Nagashima, Kumamoto (JP)
Assigned to Sony Semiconductor Solutions Corporation, Kanagawa (JP)
Appl. No. 17/618,953
Filed by SONY SEMICONDUCTOR SOLUTIONS CORPORATION, Kanagawa (JP)
PCT Filed Jun. 17, 2020, PCT No. PCT/JP2020/023712
§ 371(c)(1), (2) Date Dec. 14, 2021,
PCT Pub. No. WO2020/255999, PCT Pub. Date Dec. 24, 2020.
Claims priority of provisional application 62/864,907, filed on Jun. 21, 2019.
Prior Publication US 2022/0271073 A1, Aug. 25, 2022
Int. Cl. H01L 27/146 (2006.01)
CPC H01L 27/14605 (2013.01) [H01L 27/14621 (2013.01); H01L 27/14623 (2013.01); H01L 27/14627 (2013.01); H01L 27/14638 (2013.01); H01L 27/14649 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A photoelectric conversion element comprising:
a semiconductor substrate;
a first photoelectric converter that is provided above the semiconductor substrate, and that detects and photoelectrically converts light in a first wavelength range including a visible light range;
a second photoelectric converter that is provided in the semiconductor substrate at a position overlapping the first photoelectric converter in a thickness direction of the semiconductor substrate, and that detects and photoelectrically converts light in a second wavelength range including an infrared light range; and
an optical filter that is provided above the first photoelectric converter, and that allows light of a predetermined color component included in a predetermined wavelength range to pass therethrough,
the first photoelectric converter including first and second electrodes, a third electrode, and a first photoelectric conversion layer disposed between the first and second electrodes and the third electrode,
the second photoelectric converter including a first photoelectric conversion region, and
the optical filter including a first color filter and a second color filter,
wherein the first color filter overlaps the first electrode and the first photoelectric conversion region and the second color filter overlaps the second electrode and the first photoelectric conversion region, and
wherein the first color filter is configured to allow light of a first predetermined color component to pass therethrough and the second color filter is configured to allow light of a second predetermined color component which is different than the first predetermined color component to pass therethrough.