US 11,817,339 B2
Electrostatic chuck device and method for manufacturing same
Nobuhiro Hidaka, Tokyo (JP); and Naoto Kimura, Tokyo (JP)
Assigned to SUMITOMO OSAKA CEMENT CO., LTD., Tokyo (JP)
Appl. No. 17/041,935
Filed by SUMITOMO OSAKA CEMENT CO., LTD., Tokyo (JP)
PCT Filed Mar. 26, 2019, PCT No. PCT/JP2019/012799
§ 371(c)(1), (2) Date Sep. 25, 2020,
PCT Pub. No. WO2019/189141, PCT Pub. Date Oct. 3, 2019.
Claims priority of application No. 2018-066941 (JP), filed on Mar. 30, 2018.
Prior Publication US 2021/0013082 A1, Jan. 14, 2021
Int. Cl. H01T 23/00 (2006.01); H01L 21/683 (2006.01); C04B 35/117 (2006.01); C04B 35/64 (2006.01); H01J 37/32 (2006.01)
CPC H01L 21/6833 (2013.01) [C04B 35/117 (2013.01); C04B 35/64 (2013.01); H01J 37/32715 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3834 (2013.01); C04B 2235/3839 (2013.01); C04B 2235/422 (2013.01); C04B 2235/6562 (2013.01); C04B 2235/785 (2013.01); C04B 2235/786 (2013.01); C04B 2235/85 (2013.01); H01J 2237/334 (2013.01)] 10 Claims
OG exemplary drawing
 
1. An electrostatic chuck device comprising:
a base having one main surface serving as a mounting surface on which a plate-shaped sample is mounted; and
an electrode for electrostatic attraction provided on a side opposite to the mounting surface in the base,
wherein the base consists of a ceramic material, and
the ceramic material is a sintered body containing aluminum oxide and silicon carbide as main components thereof and having a layered graphene present at a grain boundary of the aluminum oxide.