CPC H01L 21/6833 (2013.01) [C04B 35/117 (2013.01); C04B 35/64 (2013.01); H01J 37/32715 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3834 (2013.01); C04B 2235/3839 (2013.01); C04B 2235/422 (2013.01); C04B 2235/6562 (2013.01); C04B 2235/785 (2013.01); C04B 2235/786 (2013.01); C04B 2235/85 (2013.01); H01J 2237/334 (2013.01)] | 10 Claims |
1. An electrostatic chuck device comprising:
a base having one main surface serving as a mounting surface on which a plate-shaped sample is mounted; and
an electrode for electrostatic attraction provided on a side opposite to the mounting surface in the base,
wherein the base consists of a ceramic material, and
the ceramic material is a sintered body containing aluminum oxide and silicon carbide as main components thereof and having a layered graphene present at a grain boundary of the aluminum oxide.
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