US 11,817,333 B2
Miniaturized semiconductor manufacturing system
Hsueh-Hsien Wu, Hsinchu (TW); and Chih-Yuan Chan, Hsinchu County (TW)
Assigned to SYSKEY TECHNOLOGY CO., LTD., Hsinchu County (TW)
Filed by Syskey Technology Co., Ltd., Hsinchu County (TW)
Filed on Mar. 17, 2021, as Appl. No. 17/204,495.
Claims priority of application No. 110104405 (TW), filed on Feb. 5, 2021.
Prior Publication US 2022/0254665 A1, Aug. 11, 2022
Int. Cl. H01L 21/677 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/67207 (2013.01) [H01L 21/6719 (2013.01); H01L 21/67023 (2013.01); H01L 21/67706 (2013.01); H01L 21/67724 (2013.01); H01L 21/67742 (2013.01); H01L 21/68742 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A miniaturized semiconductor manufacturing system, including:
a housing, including an inner space and an opening communicated with the inner space;
a lifting mechanism, disposed in the inner space and including a holder configured for a substrate to be placed thereon, the holder being movable in a first direction relative to the opening between a first position and a second position;
a processing chamber, disposed in the inner space and including a holding portion configured for the substrate to be placed thereon; and
a transportation mechanism, disposed between the lifting mechanism and the processing chamber and being movable in a second direction, configured to transport the substrate between the holder and the holding portion;
wherein ratio value of a length to a width of the housing is between 1 to 6; when the holder is in the first position, the holder is at least partially located within the opening; when the holder is in the second position, the transportation mechanism corresponds to the holder and is configured to take the substrate from the holder or place the substrate on the holder;
wherein the miniaturized semiconductor manufacturing system further includes a cover openably covered the opening and at least one actuating rod connected with the cover, each of the at least one actuating rod includes a first end connected with the cover and a second end opposite to the first end and protruding into the inner space; and when the holder is moving toward the first position, the lifting mechanism is abutted against the second end and the at least one actuating rod drives the cover to move away from the opening.