US 11,817,331 B2
Substrate holder replacement with protective disk during pasting process
Srinivasa Rao Yedla, Bangalore (IN); Kirankumar Neelasandra Savandaiah, Bangalore (IN); Thomas Brezoczky, Los Gatos, CA (US); Bhaskar Prasad, Jamshedpur (IN); and Nitin Bharadwaj Satyavolu, Kakinada (IN)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jul. 27, 2020, as Appl. No. 16/940,058.
Prior Publication US 2022/0028711 A1, Jan. 27, 2022
Int. Cl. H01L 21/67 (2006.01); B65G 29/00 (2006.01); B25J 15/00 (2006.01)
CPC H01L 21/67196 (2013.01) [B25J 15/009 (2013.01); B25J 15/0019 (2013.01); B65G 29/00 (2013.01); H01L 21/67167 (2013.01); B65G 2201/0297 (2013.01); B65G 2814/0313 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A shutter disc for use in a cluster tool assembly comprising a processing chamber and a transfer arm, the shutter disc comprising:
an inner disc; and
an outer disc configured to be disposed on the inner disc, wherein the inner disc comprises:
a plurality of locating features configured to mate with locating pins of the transfer arm of the cluster tool assembly; and
a plurality of notched centering features disposed in and attached to openings in the inner disc and having a notch configured to mate with pin-shaped alignment elements of a substrate support disposed in the processing chamber of the cluster tool assembly.