CPC H01L 21/67196 (2013.01) [B25J 15/009 (2013.01); B25J 15/0019 (2013.01); B65G 29/00 (2013.01); H01L 21/67167 (2013.01); B65G 2201/0297 (2013.01); B65G 2814/0313 (2013.01)] | 17 Claims |
1. A shutter disc for use in a cluster tool assembly comprising a processing chamber and a transfer arm, the shutter disc comprising:
an inner disc; and
an outer disc configured to be disposed on the inner disc, wherein the inner disc comprises:
a plurality of locating features configured to mate with locating pins of the transfer arm of the cluster tool assembly; and
a plurality of notched centering features disposed in and attached to openings in the inner disc and having a notch configured to mate with pin-shaped alignment elements of a substrate support disposed in the processing chamber of the cluster tool assembly.
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