CPC H01L 21/02057 (2013.01) [B01F 23/2319 (2022.01); B01F 23/811 (2022.01); B08B 3/08 (2013.01); B08B 3/10 (2013.01); C02F 1/68 (2013.01); C11D 3/04 (2013.01); C11D 3/3947 (2013.01); C11D 11/0047 (2013.01); G03F 7/423 (2013.01); B01F 23/237613 (2022.01); B01F 2101/4505 (2022.01); B01F 2101/48 (2022.01); B01F 2215/044 (2013.01); B08B 2203/005 (2013.01); B08B 2203/007 (2013.01)] | 20 Claims |
1. A method of producing heated ozone water obtained by dissolving ozone in pure water, the method comprising:
adjusting a pH of the pure water to 3 or less by adding citric acid to the pure water, to obtain an acid water;
dissolving an ozone gas in the acid water to obtain an ozone water; and
heating the pure water, the acid water or the ozone water, to 60° C. or more.
|