CPC H01J 37/32642 (2013.01) [H01J 37/32174 (2013.01); H01J 37/32715 (2013.01); H01J 2237/3341 (2013.01)] | 17 Claims |
1. A focus ring, comprising:
a first conductive layer having a first thickness and a first specific resistance;
a second conductive layer stacked on the first conductive layer, the second conductive layer having a second thickness greater than the first thickness and a second specific resistance greater than the first specific resistance; and
a dielectric layer on one of a lower surface of the first conductive layer or an upper surface of the second conductive layer,
wherein the second specific resistance is 10 times to 100 times the first specific resistance.
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