US 11,817,294 B2
Chemical vapor deposition apparatus and method of manufacturing display apparatus using the same
Jong-hoon Park, Asan-si (KR); Sukwon Jung, Sejong-si (KR); Hyunwoo Joo, Seoul (KR); Jaihyuk Choi, Hwaseong-si (KR); Kyungjoo Min, Yongin-si (KR); and Wonwoong Park, Seoul (KR)
Assigned to Samsung Display Co., Ltd., Yongin-Si (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Apr. 11, 2022, as Appl. No. 17/718,047.
Application 17/718,047 is a division of application No. 15/994,486, filed on May 31, 2018, granted, now 11,302,517.
Claims priority of application No. 10-2017-0087963 (KR), filed on Jul. 11, 2017.
Prior Publication US 2022/0238306 A1, Jul. 28, 2022
Int. Cl. H01J 37/32 (2006.01); C23C 16/44 (2006.01); C23C 16/505 (2006.01); C23C 16/455 (2006.01); C23C 16/509 (2006.01); H10K 71/00 (2023.01); C23C 16/34 (2006.01); H10K 71/16 (2023.01)
CPC H01J 37/32082 (2013.01) [C23C 16/4411 (2013.01); C23C 16/4412 (2013.01); C23C 16/45565 (2013.01); C23C 16/505 (2013.01); C23C 16/5096 (2013.01); H01J 37/3244 (2013.01); H01J 37/32091 (2013.01); H01J 37/32458 (2013.01); H01J 37/32467 (2013.01); H01J 37/32568 (2013.01); H01J 37/32577 (2013.01); H10K 71/00 (2023.02); C23C 16/345 (2013.01); H01J 2237/3321 (2013.01); H10K 71/164 (2023.02)] 10 Claims
OG exemplary drawing
 
1. A method of manufacturing a display apparatus, the method comprising:
preparing a substrate having an organic light-emitting diode on a susceptor disposed in a chamber;
forming a plasma region disposed over the susceptor by applying power to a backing plate of which a top surface and a sidewall are covered by an insulator; and
providing a deposition gas into the plasma region to form a first inorganic thin layer on the organic light-emitting diode,
wherein the insulator including:
a first portion covering the top surface of the backing plate, the first portion including a plurality of protrusions which protrude from edges of the first portion toward the backing plate to cover sides of the backing plate; and
a second portion assembled with the first portion and covering a sidewall of the backing plate, the second portion including a plurality of engaging portions which are recessed from a top surface of the second portion and are disposed in regions corresponding to the plurality of protrusion, and
wherein the plurality of protrusions in the first portion and the plurality of engaging portions in the second portion are coupled to each other to receive the backing plate in a space formed by the first portion and the second portion.