CPC G03F 7/70958 (2013.01) [G03F 7/70316 (2013.01); G03F 7/70408 (2013.01)] | 20 Claims |
1. A component comprising:
a substrate;
a photoresist layer disposed on the substrate; and
a light diffusing layer sandwiched between the substrate and the photoresist layer, the light diffusing layer comprising an outer metal oxide layer having an outer rough surface configured to diffuse laser light during laser interference lithography of the photoresist layer and reduce to a conductive metallic layer during electroplating of the substrate.
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