CPC G02B 21/365 (2013.01) [G02B 21/0032 (2013.01); G02B 21/361 (2013.01); G06T 7/73 (2017.01); G06V 20/69 (2022.01)] | 17 Claims |
1. A method comprising:
receiving, by a computing system, a scan of a substrate using a microscope inspection system, the substrate comprising one or more objects;
for each object on the substrate, classifying, by an artificial intelligence model of the computing system, a type corresponding to the object;
for each object on the substrate, identifying, by the computing system, an initial object position on the substrate; and
predicting, by the artificial intelligence model, a future position of each object on the substrate and an anticipated amount of deformity for each object at the future position based on the type of object and the initial object position.
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