US 11,815,526 B2
Aging compensation of a ferroelectric piezoelectric shock sensor
Scott Robert Summerfelt, Garland, TX (US); and Benjamin Stassen Cook, Addison, TX (US)
Assigned to TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US)
Filed by TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US)
Filed on Apr. 28, 2022, as Appl. No. 17/732,475.
Application 17/732,475 is a division of application No. 16/856,488, filed on Apr. 23, 2020, granted, now 11,320,453.
Claims priority of provisional application 62/955,238, filed on Dec. 30, 2019.
Prior Publication US 2022/0252637 A1, Aug. 11, 2022
Int. Cl. G01P 21/00 (2006.01); G01P 15/09 (2006.01)
CPC G01P 21/00 (2013.01) [G01P 15/09 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A method comprising:
measuring a temperature of a semiconductor die, in which the semiconductor die includes a piezoelectric device, a pyroelectric device, and a memory;
receiving a signal from the pyroelectric device;
based on the signal and the temperature, determining a calibration parameter of the piezoelectric device; and
storing the calibration parameter into the memory.