US 11,815,493 B2
Defect inspection apparatus and defect inspection method
Takahide Hatahori, Kyoto (JP); Kenji Takubo, Kyoto (JP); and Koki Yoshida, Kyoto (JP)
Assigned to Shimadzu Corporation, Kyoto (JP)
Appl. No. 17/413,374
Filed by Shimadzu Corporation, Kyoto (JP)
PCT Filed Dec. 20, 2018, PCT No. PCT/JP2018/046946
§ 371(c)(1), (2) Date Jun. 11, 2021,
PCT Pub. No. WO2020/129209, PCT Pub. Date Jun. 25, 2020.
Prior Publication US 2022/0026396 A1, Jan. 27, 2022
Int. Cl. G01N 29/24 (2006.01); G01N 29/06 (2006.01); G01N 29/04 (2006.01)
CPC G01N 29/2418 (2013.01) [G01N 29/043 (2013.01); G01N 29/0609 (2013.01); G01N 29/0654 (2013.01); G01N 2291/023 (2013.01); G01N 2291/0289 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A defect inspection apparatus comprising:
an excitation unit configured to excite elastic waves in an inspection target object;
an irradiation unit configured to emit laser light to a measurement area of the inspection target object in a state in which the elastic waves are excited by the excitation unit;
a measurement unit configured to cause the laser light reflected at mutually different positions in the measurement area to interfere with each other to acquire interference light and measure the interference light; and
a control unit, the control unit being configured to
acquire an image representing a vibration state of the inspection target object in the measurement area based on a measurement result of the measurement unit,
detect a discontinuous portion in the vibration state in the measurement area from the image representing the vibration state as a defect, and
identify a type of the defect based on at least one of a shape of the detected defect and the vibration state of a defective portion,
wherein the image representing the vibration state is a moving image in which a temporal change of a vibration displacement is displayed.