US 11,815,472 B2
Inspection system and inspection method
Naoya Nakayama, Tokyo (JP); Masanori Sekido, Tokyo (JP); Shinichi Morimoto, Tokyo (JP); and Masayuki Ariyoshi, Tokyo (JP)
Assigned to NEC CORPORATION, Tokyo (JP)
Filed by NEC Corporation, Tokyo (JP)
Filed on Mar. 9, 2022, as Appl. No. 17/690,277.
Claims priority of application No. 2021-045903 (JP), filed on Mar. 19, 2021.
Prior Publication US 2022/0299450 A1, Sep. 22, 2022
Int. Cl. G01R 27/04 (2006.01); G01R 27/32 (2006.01); G01N 22/00 (2006.01); G01R 27/28 (2006.01); G01R 27/06 (2006.01); G01N 22/04 (2006.01); G01N 21/3581 (2014.01)
CPC G01N 22/00 (2013.01) [G01R 27/04 (2013.01); G01R 27/06 (2013.01); G01R 27/28 (2013.01); G01N 21/3581 (2013.01); G01N 22/04 (2013.01); G01N 2223/639 (2013.01)] 13 Claims
OG exemplary drawing
 
1. An inspection system, comprising:
at least one memory configured to store one or more instructions; and
at least one processor configured to execute the one or more instructions to:
controlling an antenna of the inspection system to irradiate an electromagnetic wave to an inspection target person, the electromagnetic wave having a wavelength of equal to or more than 30 micrometers and equal to or less than one meter;
detecting, by a sensor of the inspection system, a reflection wave of the electromagnetic wave irradiated to the inspection target person;
perform detection processing comprising detecting a feature value of a signal of the reflection wave of the electromagnetic wave irradiated to the inspection target person and detected by the sensor; and
decide a path in which the inspection target person advances, based on a result of the detection processing comprising detecting the feature value of the signal of the reflection wave of the electromagnetic wave irradiated to the inspection target person by the antenna and detected by the sensor; and
perform processing of guiding the inspection target person to the path by controlling at least one of a plurality of gates to open based on detecting the feature value of the signal of the reflection wave of the electromagnetic wave irradiated to the inspection target person by the antenna and detected by the sensor.