US 11,815,467 B2
Nano projection structure inspection apparatus and nano projection structure inspection method
Yuki Sato, Toyota (JP); Syoichi Tsuchiya, Toyota (JP); Masataka Asai, Toyota (JP); Tsuyoshi Asano, Toyota (JP); Masahiro Uchimura, Toyota (JP); and Nozomi Tateyama, Okazaki (JP)
Assigned to PRIME PLANET ENERGY & SOLUTIONS, INC., Tokyo (JP); and TOYOTA JIDOSHA KABUSHIKI KAISHA, Aichi-Ken (JP)
Filed by Prime Planet Energy & Solutions, Inc., Tokyo (JP); and TOYOTA JIDOSHA KABUSHIKI KAISHA, Aichi-ken (JP)
Filed on Feb. 13, 2022, as Appl. No. 17/670,492.
Claims priority of application No. 2021-021403 (JP), filed on Feb. 15, 2021.
Prior Publication US 2022/0260501 A1, Aug. 18, 2022
Int. Cl. G01N 21/88 (2006.01)
CPC G01N 21/8806 (2013.01) [G01N 2021/8835 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A nano projection structure inspection apparatus, comprising:
an inspection light irradiation part configured to irradiate inspection light to an inspected surface being a metal surface, wherein a material of the metal surface is aluminum; and
a chromameter in which an imaging optical axis of an imaging element is arranged to be tilted to a regular reflection direction of the inspection light caused by the inspected surface, wherein
the chromameter is configured to cause the imaging element to receive diffusion reflection light among reflection light of the inspection light from the inspected surface, the reflection light including regular reflection light and the diffusion reflection light, so as to inspect a nanoscale projection structure on the inspected surface,
a wavelength region of the inspection light irradiated by the inspection light irradiation part includes a wavelength region of 200 nm to 380 nm, and
the chromameter is configured to output at least a light reception result of the wavelength region of 200 nm to 380 nm.