CPC G01N 21/8806 (2013.01) [G01N 2021/8835 (2013.01)] | 4 Claims |
1. A nano projection structure inspection apparatus, comprising:
an inspection light irradiation part configured to irradiate inspection light to an inspected surface being a metal surface, wherein a material of the metal surface is aluminum; and
a chromameter in which an imaging optical axis of an imaging element is arranged to be tilted to a regular reflection direction of the inspection light caused by the inspected surface, wherein
the chromameter is configured to cause the imaging element to receive diffusion reflection light among reflection light of the inspection light from the inspected surface, the reflection light including regular reflection light and the diffusion reflection light, so as to inspect a nanoscale projection structure on the inspected surface,
a wavelength region of the inspection light irradiated by the inspection light irradiation part includes a wavelength region of 200 nm to 380 nm, and
the chromameter is configured to output at least a light reception result of the wavelength region of 200 nm to 380 nm.
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