US 11,815,436 B2
Detection of surface particles on chamber components with carbon dioxide
Changgong Wang, San Jose, CA (US); Zhili Zuo, Santa Clara, CA (US); Chang Ke, Sunnyvale, CA (US); and Song-Moon Suh, Sunnyvale, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed on Aug. 11, 2022, as Appl. No. 17/819,255.
Application 17/819,255 is a continuation of application No. 16/529,630, filed on Aug. 1, 2019, granted, now 11,441,974.
Prior Publication US 2022/0381653 A1, Dec. 1, 2022
Int. Cl. G01N 1/02 (2006.01); G01N 15/02 (2006.01); G01N 15/06 (2006.01); G01N 15/14 (2006.01); G01N 15/00 (2006.01)
CPC G01N 1/02 (2013.01) [G01N 15/02 (2013.01); G01N 15/065 (2013.01); G01N 15/14 (2013.01); G01N 2001/028 (2013.01); G01N 2015/0019 (2013.01); G01N 2015/0294 (2013.01); G01N 2015/1493 (2013.01); G01N 2015/1497 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method comprising:
directing a stream comprising at least one of solid CO2 particles or CO2 droplets toward an article, wherein the article comprises a plurality of surface particles, and wherein the stream comprising at least one of solid CO2 particles or CO2 droplets causes at least a portion of the plurality of surface particles on the article to dislodge from a surface of the article;
initiating a purge cycle to transport at least some of a portion of the plurality of surface particles dislodged from the surface of the article away from the surface of the article, wherein the purge cycle comprises generating a laminar flow at a first velocity for a first time period and subsequently generating a laminar flow at a second velocity for a second time period;
determining whether a number of particles transported away from the surface of the article satisfies a particle criterion; and
responsive to determining that the number of particles transported away from the surface of the article does not satisfy the particle criterion, re-initiating the purge cycle.