CPC G01C 19/5712 (2013.01) [G01C 19/5747 (2013.01); G01C 19/5762 (2013.01)] | 15 Claims |
1. A microelectromechanical systems (MEMS) device, comprising:
at least one frame gyroscope configured to sense a first component of angular velocity associated with the MEMS device around a first axis;
at least two drive shuttles comprising respective guided masses and coupled to the at least one frame gyroscope; and
at least two proof masses coupled with respective ones of the at least two drive shuttles and configured to sense a second component of angular velocity associated with the MEMS device around a second axis that is orthogonal to the first axis, wherein the at least two drive shuttles are constrained to not respond to angular velocity associated with the MEMS device around the first axis and the second axis.
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