US 11,815,354 B2
Drive and sense balanced, semi-coupled 3-axis gyroscope
Doruk Senkal, San Jose, CA (US); Robert Hennessy, San Jose, CA (US); Houri Johari-Galle, San Jose, CA (US); and Joseph Seeger, Menlo Park, CA (US)
Assigned to INVENSENSE, INC., San Jose, CA (US)
Filed by INVENSENSE, INC., San Jose, CA (US)
Filed on Dec. 30, 2020, as Appl. No. 17/138,392.
Application 17/138,392 is a division of application No. 15/940,810, filed on Mar. 29, 2018, granted, now 10,914,584.
Application 15/940,810 is a continuation in part of application No. 15/865,189, filed on Jan. 8, 2018, abandoned.
Application 15/865,189 is a continuation of application No. 14/678,774, filed on Apr. 3, 2015, granted, now 9,863,769, issued on Jan. 9, 2018.
Application 14/678,774 is a continuation in part of application No. 14/472,143, filed on Aug. 28, 2014, granted, now 9,395,183, issued on Jul. 19, 2016.
Application 14/472,143 is a continuation in part of application No. 14/041,810, filed on Sep. 30, 2013, granted, now 9,170,107, issued on Oct. 27, 2015.
Application 14/472,143 is a continuation of application No. 13/235,296, filed on Sep. 16, 2011, granted, now 8,833,162, issued on Sep. 16, 2014.
Claims priority of provisional application 62/529,401, filed on Jul. 6, 2017.
Claims priority of provisional application 62/001,474, filed on May 21, 2014.
Prior Publication US 2021/0116244 A1, Apr. 22, 2021
Int. Cl. G01C 19/5712 (2012.01); G01C 19/5747 (2012.01); G01C 19/5762 (2012.01)
CPC G01C 19/5712 (2013.01) [G01C 19/5747 (2013.01); G01C 19/5762 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A microelectromechanical systems (MEMS) device, comprising:
at least one frame gyroscope configured to sense a first component of angular velocity associated with the MEMS device around a first axis;
at least two drive shuttles comprising respective guided masses and coupled to the at least one frame gyroscope; and
at least two proof masses coupled with respective ones of the at least two drive shuttles and configured to sense a second component of angular velocity associated with the MEMS device around a second axis that is orthogonal to the first axis, wherein the at least two drive shuttles are constrained to not respond to angular velocity associated with the MEMS device around the first axis and the second axis.