US 11,815,348 B2
Template, workpiece, and alignment method
Takashi Sato, Kanagawa (JP); and Satoshi Mitsugi, Kanagawa (JP)
Assigned to Kioxia Corporation, Tokyo (JP)
Filed by Kioxia Corporation, Tokyo (JP)
Filed on Sep. 9, 2021, as Appl. No. 17/471,026.
Claims priority of application No. 2021-048653 (JP), filed on Mar. 23, 2021.
Prior Publication US 2022/0307826 A1, Sep. 29, 2022
Int. Cl. G01B 11/27 (2006.01); G03F 1/42 (2012.01); H01L 23/544 (2006.01)
CPC G01B 11/272 (2013.01) [G03F 1/42 (2013.01); H01L 23/544 (2013.01); H01L 2223/54426 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A template comprising:
an alignment mark,
wherein the alignment mark includes first marks arranged at a first pitch in a first direction, and second marks arranged at a second pitch in the first direction,
at least one of the first marks includes a first region and a third region,
at least one of the second marks includes a second region and the third region,
the first region has first patterns arranged in a line-and-space form in the first direction,
the second region has second patterns arranged in a line-and-space form in a second direction orthogonal to the first direction,
wherein
in the first region, first polarized light having electric fields vibrating along a first plane including the first direction is transmitted with a higher transmittance than second polarized light having electric fields vibrating along a second plane orthogonal to the first plane, and the second polarized light is reflected with a higher reflectance than the first polarized light, and
in the second region, the second polarized light is transmitted with a higher transmittance than the first polarized light, and the first polarized light is reflected with a higher reflectance than the second polarized light.