CPC G01B 11/272 (2013.01) [G03F 1/42 (2013.01); H01L 23/544 (2013.01); H01L 2223/54426 (2013.01)] | 18 Claims |
1. A template comprising:
an alignment mark,
wherein the alignment mark includes first marks arranged at a first pitch in a first direction, and second marks arranged at a second pitch in the first direction,
at least one of the first marks includes a first region and a third region,
at least one of the second marks includes a second region and the third region,
the first region has first patterns arranged in a line-and-space form in the first direction,
the second region has second patterns arranged in a line-and-space form in a second direction orthogonal to the first direction,
wherein
in the first region, first polarized light having electric fields vibrating along a first plane including the first direction is transmitted with a higher transmittance than second polarized light having electric fields vibrating along a second plane orthogonal to the first plane, and the second polarized light is reflected with a higher reflectance than the first polarized light, and
in the second region, the second polarized light is transmitted with a higher transmittance than the first polarized light, and the first polarized light is reflected with a higher reflectance than the second polarized light.
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