US 11,815,346 B2
Device for the chromatic confocal measurement of a local height and/or orientation of a surface of a sample and corresponding methods for measuring a height or a roughness of a sample
Jérôme Gaillard-Groleas, Aix en Provence (FR); Sébastien Gerand, Le Tholonet (FR); and Gabrielle Moussu, Marseilles (FR)
Assigned to SCIENCES ET TECHNIQUES INDUSTRIELLES DE LA LUMIERE
Appl. No. 17/281,780
Filed by SCIENCES ET TECHNIQUES INDUSTRIELLES DE LA LUMIERE, Aix-en-Provence (FR)
PCT Filed Oct. 2, 2019, PCT No. PCT/EP2019/076762
§ 371(c)(1), (2) Date Mar. 31, 2021,
PCT Pub. No. WO2020/070220, PCT Pub. Date Apr. 9, 2020.
Claims priority of application No. 1859112 (FR), filed on Oct. 2, 2018.
Prior Publication US 2021/0381821 A1, Dec. 9, 2021
Int. Cl. G01B 11/06 (2006.01); G01B 11/30 (2006.01)
CPC G01B 11/0608 (2013.01) [G01B 11/303 (2013.01); G01B 2210/50 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A chromatic confocal measurement device comprising:
a light source configured to generate a polychromatic light beam;
a projection objective lens including an axial chromatism objective lens configured to apply the polychromatic light beam on a surface of a sample, the polychromatic light beam having a defined propagation axis;
an optical sensor configured to receive a reflected light beam, which is reflected from the surface of the sample, and to measure a total energy of the reflected light beam received during an integration interval; and
a scanning system coupled to the projection objective lens and configured to move the propagation axis of the light beam relative to the projection objective lens along a predetermined path during the integration interval of the optical sensor, so that the total energy measured by the optical sensor corresponds to a dynamic spatial average of the total energy of the reflected light beam along the predetermined path.