CPC G01B 11/0608 (2013.01) [G01B 11/303 (2013.01); G01B 2210/50 (2013.01)] | 20 Claims |
1. A chromatic confocal measurement device comprising:
a light source configured to generate a polychromatic light beam;
a projection objective lens including an axial chromatism objective lens configured to apply the polychromatic light beam on a surface of a sample, the polychromatic light beam having a defined propagation axis;
an optical sensor configured to receive a reflected light beam, which is reflected from the surface of the sample, and to measure a total energy of the reflected light beam received during an integration interval; and
a scanning system coupled to the projection objective lens and configured to move the propagation axis of the light beam relative to the projection objective lens along a predetermined path during the integration interval of the optical sensor, so that the total energy measured by the optical sensor corresponds to a dynamic spatial average of the total energy of the reflected light beam along the predetermined path.
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