CPC C23C 18/1216 (2013.01) [C23C 18/06 (2013.01); C23C 18/127 (2013.01); C23C 18/1254 (2013.01); C23C 18/143 (2019.05); C23C 18/145 (2019.05); H01L 21/02 (2013.01); H01L 21/02554 (2013.01); H01L 21/02565 (2013.01); H01L 29/24 (2013.01); H01L 29/66 (2013.01)] | 24 Claims |
1. A method for producing a patterned structure of microchannels on a substrate, comprising the steps of: (a) coating the substrate with a layer comprising a metal oxide film precursor and a linking agent precursor; (b) exposing the coated surface to patterned actinic radiation that activates the linking agent precursor in a patterned fashion to form a linking agent, the linking agent reacting with the metal oxide film precursor to produce a patterned structure of microchannels comprising a metal oxide film.
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