US 11,814,730 B2
Methods for producing metal oxide films
John C. Warner, Mill Valley, CA (US); Emily Stoler, Mill Valley, CA (US); Dwight Tshudy, Mill Valley, CA (US); and David Wolf, Mill Valley, CA (US)
Assigned to Warner Babcock Institute for Green Chemistry, LLC, Mill Valley, CA (US)
Appl. No. 16/618,563
Filed by WARNER BABCOCK INSTITUTE FOR GREEN CHEMISTRY, LLC, Mill Valley, CA (US)
PCT Filed Jun. 1, 2018, PCT No. PCT/US2018/035576
§ 371(c)(1), (2) Date Dec. 2, 2019,
PCT Pub. No. WO2018/222976, PCT Pub. Date Dec. 6, 2018.
Claims priority of provisional application 62/514,094, filed on Jun. 2, 2017.
Prior Publication US 2020/0165730 A1, May 28, 2020
Int. Cl. C23C 18/12 (2006.01); C23C 18/14 (2006.01); C23C 18/06 (2006.01); H01L 21/02 (2006.01); H01L 29/24 (2006.01); H01L 29/66 (2006.01)
CPC C23C 18/1216 (2013.01) [C23C 18/06 (2013.01); C23C 18/127 (2013.01); C23C 18/1254 (2013.01); C23C 18/143 (2019.05); C23C 18/145 (2019.05); H01L 21/02 (2013.01); H01L 21/02554 (2013.01); H01L 21/02565 (2013.01); H01L 29/24 (2013.01); H01L 29/66 (2013.01)] 24 Claims
OG exemplary drawing
 
1. A method for producing a patterned structure of microchannels on a substrate, comprising the steps of: (a) coating the substrate with a layer comprising a metal oxide film precursor and a linking agent precursor; (b) exposing the coated surface to patterned actinic radiation that activates the linking agent precursor in a patterned fashion to form a linking agent, the linking agent reacting with the metal oxide film precursor to produce a patterned structure of microchannels comprising a metal oxide film.