US 11,812,539 B2
Resonator, linear accelerator configuration and ion implantation system having rotating exciter
Costel Biloiu, Rockport, MA (US); David T. Blahnik, Round Rock, TX (US); Wai-Ming Tam, Manchester-by-the-Sea, MA (US); Charles T. Carlson, Cedar Park, TX (US); and Frank Sinclair, Boston, MA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Oct. 20, 2021, as Appl. No. 17/506,185.
Prior Publication US 2023/0124350 A1, Apr. 20, 2023
Int. Cl. H05H 7/02 (2006.01); H05H 7/12 (2006.01); H05H 9/00 (2006.01)
CPC H05H 7/02 (2013.01) [H05H 7/12 (2013.01); H05H 9/00 (2013.01); H05H 2007/025 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An exciter for a high frequency resonator, comprising:
an exciter coil inner portion, extending along an exciter axis;
an exciter coil loop, disposed at a distal end of the exciter coil inner portion; and
a drive mechanism, the drive mechanism comprising at least a rotation component to rotate the exciter coil loop around the exciter axis.