US 11,811,392 B2
Surface acoustic wave resonator with suppressed transverse modes using selective dielectric removal
Yuya Hiramatsu, Neyagawa (JP); Rei Goto, Osaka (JP); and Yumi Torazawa, Takatsuki (JP)
Assigned to SKYWORKS SOLUTIONS, INC., Irvine, CA (US)
Filed by SKYWORKS SOLUTIONS, INC., Irvine, CA (US)
Filed on Oct. 22, 2020, as Appl. No. 17/076,950.
Claims priority of provisional application 62/924,775, filed on Oct. 23, 2019.
Prior Publication US 2021/0126624 A1, Apr. 29, 2021
Int. Cl. H03H 9/64 (2006.01); H03H 9/145 (2006.01); H03H 9/25 (2006.01); H04B 1/3827 (2015.01)
CPC H03H 9/6483 (2013.01) [H03H 9/145 (2013.01); H03H 9/25 (2013.01); H04B 1/3827 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A surface acoustic wave resonator comprising:
a piezoelectric substrate;
interdigital transducer electrodes disposed on an upper surface of the piezoelectric substrate, the interdigital transducer electrodes including bus bar electrode regions spaced apart from each other in a transverse direction perpendicular to a propagation direction of a surface acoustic wave to be excited, an overlapping region sandwiched between the bus bar regions, and gap regions defined between respective bus bar electrode regions and the overlapping region in the transverse direction, each of the gap regions including dummy electrodes extending within a dummy electrode region across a certain distance from a respective bus bar electrode; and
a dielectric film covering the upper surface of the piezoelectric substrate and the interdigital transducer electrodes for temperature compensation, the dielectric film including open regions to expose respective bus bar electrode regions and respective dummy electrode regions, the open regions extending to regions on opposite sides of the bus bar electrode regions from the overlapping region.