US 11,811,185 B2
Laser dicing device, method of laser beam modulation, and method of dicing a substrate
Young-chul Kwon, Asan-si (KR); Dong-woo Kang, Seoul (KR); and Man-hee Han, Cheonan-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Jul. 6, 2021, as Appl. No. 17/367,802.
Application 17/367,802 is a division of application No. 16/354,686, filed on Mar. 15, 2019, granted, now 11,075,496.
Claims priority of application No. 10-2018-0074892 (KR), filed on Jun. 28, 2018; and application No. 10-2019-0021292 (KR), filed on Feb. 22, 2019.
Prior Publication US 2021/0336401 A1, Oct. 28, 2021
Int. Cl. H01S 3/00 (2006.01); G02B 27/28 (2006.01); G02B 5/30 (2006.01); G02B 27/09 (2006.01)
CPC H01S 3/0085 (2013.01) [G02B 5/3083 (2013.01); G02B 27/0927 (2013.01); G02B 27/286 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A laser dicing device comprising:
a Gaussian laser beam emitter configured to emit a Gaussian laser beam having a Gaussian energy distribution;
a laser beam modulator configured to modulate a shape of the emitted Gaussian laser beam to form a modulated laser beam, by reducing intensity in a region surrounding a first line parallel with a laser dicing direction of the emitted Gaussian laser beam, the first line crossing a center of the Gaussian laser beam in a plan view;
a focusing lens configured to focus the modulated laser beam output by the laser beam modulator; and
a substrate support configured such that a substrate to be diced is seated on the substrate support,
wherein the focusing lens is configured to focus the modulated laser beam inside the substrate seated on the substrate support, and
wherein the laser beam modulator comprises;
a birefringent lens configured to split the Gaussian laser beam;
a center slit configured to remove a central portion of the Gaussian laser beam split by the birefringent lens; and
a side slit configured to remove side portions of the Gaussian laser beam after removing the central portion of the Gaussian laser beam by the center slit.