US 11,810,999 B2
Resonant optical cavity light emitting device
Petar Atanackovic, Henley Beach South (AU)
Assigned to Silanna UV Technologies Pte Ltd, Singapore (SG)
Filed by Silanna UV Technologies Pte Ltd, Singapore (SG)
Filed on Sep. 17, 2021, as Appl. No. 17/448,006.
Application 17/448,006 is a continuation of application No. 16/846,704, filed on Apr. 13, 2020, granted, now 11,127,882.
Application 16/846,704 is a continuation of application No. 16/160,868, filed on Oct. 15, 2018, granted, now 10,622,514, issued on Apr. 14, 2020.
Prior Publication US 2022/0005973 A1, Jan. 6, 2022
Int. Cl. H01L 33/10 (2010.01); H01L 33/00 (2010.01); H01L 33/06 (2010.01); H01L 33/32 (2010.01); H01L 33/46 (2010.01); H01L 33/60 (2010.01); H01L 33/40 (2010.01); H01S 5/183 (2006.01); H01S 5/343 (2006.01)
CPC H01L 33/105 (2013.01) [H01L 33/007 (2013.01); H01L 33/0012 (2013.01); H01L 33/0025 (2013.01); H01L 33/0075 (2013.01); H01L 33/06 (2013.01); H01L 33/32 (2013.01); H01L 33/465 (2013.01); H01L 33/60 (2013.01); H01S 5/18375 (2013.01); H01L 2933/0058 (2013.01); H01S 2301/173 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A resonant optical cavity light emitting device comprising:
a substrate that is optically transparent to a target emission deep ultraviolet wavelength (target wavelength);
a first spacer region directly coupled to the substrate, the first spacer region being non-absorbing to the target wavelength, wherein at least a portion of the first spacer region comprises a first electrical polarity;
a light emitting region on the first spacer region, the light emitting region being configured to emit the target wavelength;
a second spacer region on the light emitting region, the second spacer region being non-absorbing to the target wavelength, wherein at least a portion of the second spacer region comprises a second electrical polarity opposite of the first electrical polarity; and
a reflector coupled to the second spacer region, the reflector comprising a distributed Bragg reflector (DBR) that is reflective of the target wavelength, and wherein the reflector comprises aluminum-oxy-nitride, aluminum oxide, or magnesium fluoride;
wherein the light emitting region is positioned at a separation distance from the reflector; and
wherein the resonant optical cavity light emitting device has an optical cavity between the reflector and a first surface of the substrate, the optical cavity comprising the first spacer region, the second spacer region and the light emitting region, wherein the optical cavity has a total thickness less than or equal to K·λ/n, wherein K is a constant ranging from 0.25 to less than 1, λ is the target wavelength, and n is an effective refractive index of the optical cavity at the target wavelength.