CPC H01L 33/105 (2013.01) [H01L 33/007 (2013.01); H01L 33/0012 (2013.01); H01L 33/0025 (2013.01); H01L 33/0075 (2013.01); H01L 33/06 (2013.01); H01L 33/32 (2013.01); H01L 33/465 (2013.01); H01L 33/60 (2013.01); H01S 5/18375 (2013.01); H01L 2933/0058 (2013.01); H01S 2301/173 (2013.01)] | 8 Claims |
1. A resonant optical cavity light emitting device comprising:
a substrate that is optically transparent to a target emission deep ultraviolet wavelength (target wavelength);
a first spacer region directly coupled to the substrate, the first spacer region being non-absorbing to the target wavelength, wherein at least a portion of the first spacer region comprises a first electrical polarity;
a light emitting region on the first spacer region, the light emitting region being configured to emit the target wavelength;
a second spacer region on the light emitting region, the second spacer region being non-absorbing to the target wavelength, wherein at least a portion of the second spacer region comprises a second electrical polarity opposite of the first electrical polarity; and
a reflector coupled to the second spacer region, the reflector comprising a distributed Bragg reflector (DBR) that is reflective of the target wavelength, and wherein the reflector comprises aluminum-oxy-nitride, aluminum oxide, or magnesium fluoride;
wherein the light emitting region is positioned at a separation distance from the reflector; and
wherein the resonant optical cavity light emitting device has an optical cavity between the reflector and a first surface of the substrate, the optical cavity comprising the first spacer region, the second spacer region and the light emitting region, wherein the optical cavity has a total thickness less than or equal to K·λ/n, wherein K is a constant ranging from 0.25 to less than 1, λ is the target wavelength, and n is an effective refractive index of the optical cavity at the target wavelength.
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