CPC H01L 23/564 (2013.01) [G02B 6/4243 (2013.01); G02B 6/4248 (2013.01); G02B 6/4251 (2013.01); H01L 23/562 (2013.01); G02B 6/12 (2013.01); G02B 2006/12061 (2013.01)] | 20 Claims |
1. A method comprising:
forming a first trench in at least one substrate material;
forming a guard ring structure with an opening and which at least partially surrounds the first trench; and
forming a second trench at a dicing edge of the at least one substrate material, the second trench being lined on sidewalls with a barrier material and spacer material over the barrier material, wherein the barrier material and the spacer material are moisture seal materials which prevent moisture ingress passing through the opening of the guard ring structure.
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