US 11,810,870 B2
Moisture seal for photonic devices
Asli Sahin, Danbury, CT (US); Thomas F. Houghton, Marlboro, NY (US); Jennifer A. Oakley, Cohoes, NY (US); Jeremy S. Alderman, New Rochelle, NY (US); Karen A. Nummy, Newburgh, NY (US); and Zhuojie Wu, Port Chester, NY (US)
Assigned to GLOBALFOUNDRIES U.S. INC., Malta, NY (US)
Filed by GlobalFoundries U.S. Inc.
Filed on Dec. 23, 2022, as Appl. No. 18/146,039.
Application 18/146,039 is a division of application No. 16/713,709, filed on Dec. 13, 2019, granted, now 11,587,888.
Prior Publication US 2023/0126719 A1, Apr. 27, 2023
Int. Cl. G02B 6/42 (2006.01); H01L 23/00 (2006.01); G02B 6/12 (2006.01)
CPC H01L 23/564 (2013.01) [G02B 6/4243 (2013.01); G02B 6/4248 (2013.01); G02B 6/4251 (2013.01); H01L 23/562 (2013.01); G02B 6/12 (2013.01); G02B 2006/12061 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method comprising:
forming a first trench in at least one substrate material;
forming a guard ring structure with an opening and which at least partially surrounds the first trench; and
forming a second trench at a dicing edge of the at least one substrate material, the second trench being lined on sidewalls with a barrier material and spacer material over the barrier material, wherein the barrier material and the spacer material are moisture seal materials which prevent moisture ingress passing through the opening of the guard ring structure.