US 11,810,794 B2
Setting method of protective component and manufacturing method of protective component
Norihisa Arifuku, Tokyo (JP); Tomohiro Kaneko, Tokyo (JP); Akifumi Suzuki, Tokyo (JP); and Masamitsu Kimura, Tokyo (JP)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on Nov. 5, 2020, as Appl. No. 17/089,984.
Claims priority of application No. 2019-206409 (JP), filed on Nov. 14, 2019.
Prior Publication US 2021/0151331 A1, May 20, 2021
Int. Cl. H01L 21/56 (2006.01); B29C 51/42 (2006.01); B29C 51/00 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/565 (2013.01) [B29C 51/002 (2013.01); B29C 51/42 (2013.01); H01L 21/6836 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A setting method of a protective component that protects one surface of a plate-shaped workpiece having a plurality of regions in which a plurality of devices are formed, the setting method comprising:
a resin supply step of supplying a thermoplastic resin in a lump form, a string form, a powder form, or a fluid form to a flat support surface of a support table;
a protective component forming step of shaping the thermoplastic resin into a sheet shape through pressing and spreading the thermoplastic resin along the support surface while heating and softening the thermoplastic resin to form a protective component of the thermoplastic resin in the sheet shape on the support surface;
a protective component bonding step of bringing the one surface of the workpiece, including the plurality of regions in which the plurality of devices is formed, into direct contact with one surface of the protective component in the sheet shape and heating the protective component in tight contact to bond the protective component to the workpiece; and
a post-bonding cooling step of cooling the protective component heated in the protective component bonding step.