CPC H01J 37/3222 (2013.01) [H01J 2237/047 (2013.01)] | 19 Claims |
1. A method of operating an ion source generating arrangement, comprising:
providing a microwave energy source;
activating the microwave energy source;
transmitting microwave energy from the microwave energy source to an ion source region using an antenna, wherein the ion source region contains a cylindrical distributed ground structure surrounding the antenna;
performing an ionization of a source gas in an ionization region of the arrangement to create ions; and
transmitting the ions to a target.
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