US 11,810,763 B2
Distributed ground single antenna ion source
Benjamin Levitt, Boston, MA (US); and Brian Munroe, Cambridge, MA (US)
Assigned to SCHLUMBERGER TECHNOLOGY CORPORATION, Sugar Land, TX (US)
Filed by Schlumberger Technology Corporation, Sugar Land, TX (US)
Filed on Jan. 13, 2021, as Appl. No. 17/148,238.
Prior Publication US 2022/0223376 A1, Jul. 14, 2022
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/3222 (2013.01) [H01J 2237/047 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A method of operating an ion source generating arrangement, comprising:
providing a microwave energy source;
activating the microwave energy source;
transmitting microwave energy from the microwave energy source to an ion source region using an antenna, wherein the ion source region contains a cylindrical distributed ground structure surrounding the antenna;
performing an ionization of a source gas in an ionization region of the arrangement to create ions; and
transmitting the ions to a target.