CPC H01J 37/243 (2013.01) [H01J 37/244 (2013.01); H02M 3/07 (2013.01); H01J 37/26 (2013.01); H01J 2237/04735 (2013.01); H01J 2237/2485 (2013.01); H01J 2237/24564 (2013.01)] | 15 Claims |
1. A charged particle beam device comprising:
a charged particle gun configured to emit a charged particle beam;
a stage on which a sample is to be placed; and
a power supply circuit configured to generate a first voltage and a second voltage that determine energy of the charged particle beam and supply the first voltage to the charged particle gun, wherein
the power supply circuit includes
a first booster circuit configured to generate the first voltage,
a second booster circuit configured to generate the second voltage, and
a switching control circuit configured to perform switching control of the first booster circuit and the second booster circuit using a common switch signal.
|