US 11,810,752 B2
Charged particle beam device and power supply device
Wen Li, Tokyo (JP); Hiroyuki Takahashi, Tokyo (JP); Makoto Suzuki, Tokyo (JP); and Yuzuru Mizuhara, Tokyo (JP)
Assigned to HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
Filed on Aug. 9, 2021, as Appl. No. 17/396,866.
Claims priority of application No. 2020-143072 (JP), filed on Aug. 27, 2020.
Prior Publication US 2022/0068595 A1, Mar. 3, 2022
Int. Cl. H01J 37/24 (2006.01); H01J 37/244 (2006.01); H02M 3/07 (2006.01); H01J 37/26 (2006.01)
CPC H01J 37/243 (2013.01) [H01J 37/244 (2013.01); H02M 3/07 (2013.01); H01J 37/26 (2013.01); H01J 2237/04735 (2013.01); H01J 2237/2485 (2013.01); H01J 2237/24564 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A charged particle beam device comprising:
a charged particle gun configured to emit a charged particle beam;
a stage on which a sample is to be placed; and
a power supply circuit configured to generate a first voltage and a second voltage that determine energy of the charged particle beam and supply the first voltage to the charged particle gun, wherein
the power supply circuit includes
a first booster circuit configured to generate the first voltage,
a second booster circuit configured to generate the second voltage, and
a switching control circuit configured to perform switching control of the first booster circuit and the second booster circuit using a common switch signal.