US 11,810,748 B2
Ion gun and vacuum processing apparatus
Tsutomu Hiroishi, Kanagawa (JP); Reiji Sakamoto, Kanagawa (JP); and Hiroshi Yakushiji, Kanagawa (JP)
Assigned to CANON ANELVA CORPORATION, Kawasaki (JP)
Filed by CANON ANELVA CORPORATION, Kanagawa (JP)
Filed on Jan. 17, 2023, as Appl. No. 18/155,177.
Application 18/155,177 is a continuation of application No. PCT/JP2021/025743, filed on Jul. 8, 2021.
Claims priority of application No. PCT/JP2020/028362 (WO), filed on Jul. 22, 2020.
Prior Publication US 2023/0154721 A1, May 18, 2023
Int. Cl. H01J 37/08 (2006.01); H01J 37/305 (2006.01)
CPC H01J 37/08 (2013.01) [H01J 37/3053 (2013.01); H01J 2237/022 (2013.01); H01J 2237/152 (2013.01)] 27 Claims
OG exemplary drawing
 
1. An ion gun comprising:
an anode;
a cathode opposed to the anode and having a first portion and a second portion; and
a magnet configured to form a magnetic field space between the first portion and the second portion,
wherein an annular gap including a curved portion and no linear portion is provided between the first portion and the second portion of the cathode, and
wherein the magnet is configured to form, between the first portion and the second portion of the curved portion, a magnetic field line having a bottom inside a cross-sectional centerline of the gap.