CPC G11B 5/6058 (2013.01) [G11B 5/483 (2015.09); G11B 5/73919 (2019.05); H10N 30/03 (2023.02); H10N 30/2047 (2023.02)] | 20 Claims |
1. A device, comprising:
a substrate;
a first cavity in the substrate;
a first membrane overlying the first cavity;
a first actuator overlying the first membrane;
a second cavity in the substrate, the first and second cavities being spaced from each other by a portion of the substrate;
a second membrane overlying the second cavity;
a second actuator overlying the second membrane;
a first trench extending into the substrate; and
a second trench extending into the substrate, the first and second trenches being fluidically coupled to the first and second cavities, the first and second actuators positioned between the first and second trenches.
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