US 11,810,604 B2
Read/write device for a hard-disk memory system, and corresponding manufacturing process
Domenico Giusti, Caponago (IT); and Marco Ferrera, Concorezzo (IT)
Assigned to STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed by STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed on Sep. 21, 2022, as Appl. No. 17/949,712.
Application 17/949,712 is a continuation of application No. 17/088,394, filed on Nov. 3, 2020, granted, now 11,482,248.
Claims priority of application No. 102019000022488 (IT), filed on Nov. 29, 2019.
Prior Publication US 2023/0019422 A1, Jan. 19, 2023
Int. Cl. G11B 5/60 (2006.01); G11B 5/48 (2006.01); G11B 5/73 (2006.01); H10N 30/03 (2023.01); H10N 30/20 (2023.01)
CPC G11B 5/6058 (2013.01) [G11B 5/483 (2015.09); G11B 5/73919 (2019.05); H10N 30/03 (2023.02); H10N 30/2047 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A device, comprising:
a substrate;
a first cavity in the substrate;
a first membrane overlying the first cavity;
a first actuator overlying the first membrane;
a second cavity in the substrate, the first and second cavities being spaced from each other by a portion of the substrate;
a second membrane overlying the second cavity;
a second actuator overlying the second membrane;
a first trench extending into the substrate; and
a second trench extending into the substrate, the first and second trenches being fluidically coupled to the first and second cavities, the first and second actuators positioned between the first and second trenches.