US 11,809,205 B2
Estimator and vacuum valve
Junichiro Kozaki, Kyoto (JP)
Assigned to SHIMADZU CORPORATION, Kyoto (JP)
Filed by SHIMADZU CORPORATION, Kyoto (JP)
Filed on Mar. 8, 2021, as Appl. No. 17/194,593.
Claims priority of application No. 2020-044344 (JP), filed on Mar. 13, 2020.
Prior Publication US 2021/0286384 A1, Sep. 16, 2021
Int. Cl. G05D 16/20 (2006.01); G05B 15/02 (2006.01); F16K 37/00 (2006.01); F16K 31/04 (2006.01); F04B 49/08 (2006.01); F16K 27/04 (2006.01); F04B 49/06 (2006.01)
CPC G05D 16/208 (2013.01) [G05B 15/02 (2013.01); G05D 16/2013 (2013.01); F04B 49/065 (2013.01); F04B 49/08 (2013.01); F16K 27/04 (2013.01); F16K 31/046 (2013.01); F16K 37/0041 (2013.01)] 8 Claims
OG exemplary drawing
 
1. An estimator which estimates, fora vacuum pumping apparatus including a vacuum pump to vacuum pump a vacuum chamber and a vacuum valve disposed on a suction port side of the vacuum pump to adjust a chamber pressure of the vacuum chamber, a gas species characteristic value that is a ratio between a first effective exhaust rate of the vacuum pumping apparatus about an exhausted gas and a second effective exhaust rate of the vacuum pumping apparatus about a predetermined known gas, and a first chamber volume estimation value of the vacuum chamber, the estimator comprising:
an acquisitor to acquire a plurality of data pairs each containing a valve body opening of the vacuum valve and the chamber pressure at the valve body opening; and
an operator to operate the gas species characteristic value and the first chamber volume estimation value, based on an exhaust's expression representing a relationship among the second effective exhaust rate, a flow rate of a gas introduced into the vacuum chamber, a chamber volume, and a chamber pressure, the plurality of data pairs acquired in the acquisitor, and correlation data between the valve body opening and the second effective exhaust rate about the predetermined known gas.