CPC G05D 16/208 (2013.01) [G05B 15/02 (2013.01); G05D 16/2013 (2013.01); F04B 49/065 (2013.01); F04B 49/08 (2013.01); F16K 27/04 (2013.01); F16K 31/046 (2013.01); F16K 37/0041 (2013.01)] | 8 Claims |
1. An estimator which estimates, fora vacuum pumping apparatus including a vacuum pump to vacuum pump a vacuum chamber and a vacuum valve disposed on a suction port side of the vacuum pump to adjust a chamber pressure of the vacuum chamber, a gas species characteristic value that is a ratio between a first effective exhaust rate of the vacuum pumping apparatus about an exhausted gas and a second effective exhaust rate of the vacuum pumping apparatus about a predetermined known gas, and a first chamber volume estimation value of the vacuum chamber, the estimator comprising:
an acquisitor to acquire a plurality of data pairs each containing a valve body opening of the vacuum valve and the chamber pressure at the valve body opening; and
an operator to operate the gas species characteristic value and the first chamber volume estimation value, based on an exhaust's expression representing a relationship among the second effective exhaust rate, a flow rate of a gas introduced into the vacuum chamber, a chamber volume, and a chamber pressure, the plurality of data pairs acquired in the acquisitor, and correlation data between the valve body opening and the second effective exhaust rate about the predetermined known gas.
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