CPC G03F 7/70633 (2013.01) [G01N 21/47 (2013.01); G01N 23/2251 (2013.01); G03F 7/70608 (2013.01); G03F 7/70683 (2013.01); G01N 2223/07 (2013.01)] | 49 Claims |
1. A metrology target comprising:
a first set of pattern elements, wherein the first set of pattern elements are compatible with a first metrology mode of a first metrology sub-system along one or more directions; and
a second set of pattern elements, wherein the second set of pattern elements is compatible with a second metrology mode of a second metrology sub-system along the one or more directions, wherein the second set of pattern elements includes a first portion of the first set of pattern elements, and wherein the second set of pattern elements is surrounded by a second portion of the first set of pattern elements not included in the second set of pattern elements.
|