CPC G03F 7/70316 (2013.01) [C03C 17/10 (2013.01); G02B 5/0891 (2013.01); G02B 26/0858 (2013.01); G03F 7/7015 (2013.01); G03F 7/70266 (2013.01)] | 22 Claims |
1. Mirror having an optical effective surface, comprising:
a mirror substrate;
a reflection layer system that reflects electromagnetic radiation incident on the optical effective surface;
at least one piezoelectric layer, arranged between the mirror substrate and the reflection layer system; and
a first electrode arrangement situated on a side of the piezoelectric layer facing the reflection layer system, and a second electrode arrangement situated on a side of the piezoelectric layer facing the mirror substrate;
wherein the first electrode arrangement and the second electrode arrangement are arranged to apply an electric field to the piezoelectric layer that produces a locally variable deformation in the piezoelectric layer;
wherein one of the electrode arrangements is assigned a mediator layer having an electrical conductivity less than 200 siemens/meter that sets an at least regionally continuous electrical potential profile along the respective electrode arrangement; and
wherein the mediator layer has at least two mutually electrically insulated regions, wherein the mutually electrically insulated regions of the mediator layer extend along the piezoelectric layer.
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