CPC G02B 26/0833 (2013.01) [G02B 27/0977 (2013.01); G02F 1/133553 (2013.01)] | 9 Claims |
1. A method of providing a spatial light modulator comprising:
providing a substrate; and
providing a first phase change material cell on the substrate, the first phase change material cell comprising:
a first electrical heater on the substrate;
a first optical reflector layer on the first electrical heater; and
a first phase change material layer on the first optical reflector layer;
providing at least a second phase change material cell on the substrate, the second phase change material cell comprising:
a second electrical heater on the substrate;
a second optical reflector layer on the second electrical heater;
a second phase change material layer on the second optical reflector layer; and
providing a light absorber layer between the first phase change material cell and the second phase change material cell.
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