US 11,808,937 B1
Spatial light modulator using phase-change materials with improved fill factor
Jeong-Sun Moon, Moorpark, CA (US); Hwa Chang Seo, Torrance, CA (US); Kyung-Ah Son, Moorpark, CA (US); and Kangmu Lee, Malibu, CA (US)
Assigned to HRL LABORATORIES, LLC, Malibu, CA (US)
Filed by HRL Laboratories, LLC, Malibu, CA (US)
Filed on Oct. 27, 2021, as Appl. No. 17/512,562.
Application 17/512,562 is a division of application No. 15/949,913, filed on Apr. 10, 2018, granted, now 11,187,891.
Claims priority of provisional application 62/518,438, filed on Jun. 12, 2017.
Claims priority of provisional application 62/518,434, filed on Jun. 12, 2017.
Int. Cl. G02B 26/08 (2006.01); G02B 27/09 (2006.01); G02F 1/1335 (2006.01)
CPC G02B 26/0833 (2013.01) [G02B 27/0977 (2013.01); G02F 1/133553 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A method of providing a spatial light modulator comprising:
providing a substrate; and
providing a first phase change material cell on the substrate, the first phase change material cell comprising:
a first electrical heater on the substrate;
a first optical reflector layer on the first electrical heater; and
a first phase change material layer on the first optical reflector layer;
providing at least a second phase change material cell on the substrate, the second phase change material cell comprising:
a second electrical heater on the substrate;
a second optical reflector layer on the second electrical heater;
a second phase change material layer on the second optical reflector layer; and
providing a light absorber layer between the first phase change material cell and the second phase change material cell.