CPC G01N 33/0016 (2013.01) [C23C 16/52 (2013.01); G01F 1/74 (2013.01); G01N 11/02 (2013.01); G01N 33/0073 (2013.01)] | 20 Claims |
1. A concentration sensor assembly, comprising:
a vaporization chamber comprising a compound, the vaporization chamber to transition the compound into a gaseous state;
a first flow path coupled to the vaporization chamber, the first flow path to direct a first gas to the vaporization chamber;
a second flow path coupled to the vaporization chamber, the second flow path to direct a second gas out of the vaporization chamber, wherein the second gas comprises the compound and the first gas;
a first sensor disposed along the first flow path, the first sensor to measure first flow data indicative of a first mass flow rate of the first gas within the first flow path;
a second sensor disposed along the second flow path, the second sensor to measure second flow data indicative of a second mass flow rate of the second gas within the second flow path;
a third sensor to measure third flow data indicative of a third mass flow rate of the compound into the vaporization chamber; and
a controller coupled to the first sensor and the second sensor, the controller to determine a concentration of the compound within the second gas based on the first flow data, the second flow data, and the third flow data.
|