US 11,808,718 B2
X-ray analyzer and X-ray analysis method
Daisuke Harada, Kyoto (JP); and Yasuyuki Keyaki, Kyoto (JP)
Assigned to Shimadzu Corporation, Kyoto (JP)
Filed by Shimadzu Corporation, Kyoto (JP)
Filed on Nov. 8, 2021, as Appl. No. 17/521,404.
Claims priority of application No. 2021-033776 (JP), filed on Mar. 3, 2021.
Prior Publication US 2022/0283101 A1, Sep. 8, 2022
Int. Cl. G01N 23/046 (2018.01)
CPC G01N 23/046 (2013.01) 8 Claims
OG exemplary drawing
 
1. An X-ray analyzer comprising:
an X-ray source;
an X-ray detector configured to detect an X-ray irradiated from the X-ray source;
a stage disposed between the X-ray source and the X-ray detector, and configured to hold an imaging target; and
a visible light irradiation mechanism configured to irradiate visible light coaxially with an X-ray optical axis of the X-ray irradiated from the X-ray source to project a shadow image of the imaging target onto a position of the X-ray detector.