US 11,808,691 B2
Micro airflow generator for miniature particulate matter sensor module
Chen Feng, Snohomish, WA (US); Tao Chen, Shanghai (CN); Jennifer Liu, Shanghai (CN); and Tong Shang, Denville, NJ (US)
Assigned to HONEYWELL INTERNATIONAL INC., Charlotte, NC (US)
Filed by Honeywell International Inc., Charlotte, NC (US)
Filed on Apr. 15, 2021, as Appl. No. 17/231,720.
Application 17/231,720 is a division of application No. 16/208,842, filed on Dec. 4, 2018, granted, now 11,009,447.
Claims priority of provisional application 62/597,183, filed on Dec. 11, 2017.
Prior Publication US 2021/0231555 A1, Jul. 29, 2021
Int. Cl. G01N 15/06 (2006.01); G01N 15/14 (2006.01); F04B 43/02 (2006.01); G01N 15/00 (2006.01)
CPC G01N 15/1484 (2013.01) [F04B 43/02 (2013.01); G01N 15/06 (2013.01); G01N 15/1404 (2013.01); G01N 15/1459 (2013.01); G01N 2015/0046 (2013.01); G01N 2015/0693 (2013.01); G01N 2015/1486 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for generating airflow via a micro airflow generator within a compact optical scattering particulate matter sensor, the method comprising:
providing a micro airflow generator comprising:
a housing having at least one inlet and at least one outlet;
a piezo disc bender actuator,
wherein the piezo disc bender actuator is configured so that movement of the piezo disc bender actuator drives air through the outlet, and
wherein the piezo disc bender actuator is configured to drive movement of the piezo disc bender actuator such that the piezo disc bender actuator serves as a membrane and an actuator element of the micro airflow generator;
a diffusion channel incorporated into the housing;
a valvular conduit incorporated into the housing and in fluid communication with the diffusion channel; and
a pump plate configured to fit within the housing,
wherein the pump plate comprises an aperture in fluid communication with the valvular conduit,
wherein the piezo disc bender actuator is positioned adjacent to the pump plate within the housing, and
wherein the aperture of the pump plate is axially aligned with a longitudinal axis of a first outlet of the at least one outlet in the housing;
generating airflow out of the housing via the piezo disc bender actuator;
directing the airflow into an optical scattering particle detection module; and
detecting, by the optical scattering particle detection module, particulate matter within the airflow.