US 11,808,654 B2
Integrated optical transducer and method for detecting dynamic pressure changes
Goran Stojanovic, Eindhoven (NL); Colin Steele, Eindhoven (NL); Jens Hofrichter, Eindhoven (NL); Catalin Lazar, Eindhoven (NL); and Jochen Kraft, Eindhoven (NL)
Assigned to AMS INTERNATIONAL AG, Jona (CH)
Appl. No. 17/279,263
Filed by ams International AG, Jona (CH)
PCT Filed Sep. 17, 2019, PCT No. PCT/EP2019/074850
§ 371(c)(1), (2) Date Mar. 24, 2021,
PCT Pub. No. WO2020/064431, PCT Pub. Date Apr. 2, 2020.
Claims priority of application No. 18196899 (EP), filed on Sep. 26, 2018.
Prior Publication US 2021/0404897 A1, Dec. 30, 2021
Int. Cl. G01L 9/00 (2006.01); B81B 7/02 (2006.01); G02B 27/14 (2006.01); H04R 23/00 (2006.01)
CPC G01L 9/0016 (2013.01) [B81B 7/02 (2013.01); G02B 27/14 (2013.01); H04R 23/008 (2013.01); B81B 2201/0264 (2013.01); B81B 2201/047 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An integrated optical transducer for detecting dynamic pressure changes, the transducer comprising:
a micro-electro-mechanical system, MEMS, die having a MEMS diaphragm with a first side exposed to the dynamic pressure changes and a second side; and
an application-specific integrated circuit, ASIC, die having an optical interferometer assembly comprising:
a beam splitting element for receiving a source beam from a light source and for splitting the source beam into a probe beam in a first beam path and a reference beam in a second beam path;
a beam combining element for combining the probe beam with the reference beam to a superposition beam; and
a detector configured to receive the superposition beam and to generate an electronic interference signal depending on the superposition beam;
wherein
the MEMS die is arranged with respect to the ASIC die such that a gap is formed between the second side of the diaphragm and the ASIC die, with the gap defining a cavity and having a gap height; and
the first beam path of the probe beam comprises coupling into the cavity, reflection off of a deflection point or a deflection surface of the diaphragm and coupling out of the cavity.