CPC G01L 9/0016 (2013.01) [B81B 7/02 (2013.01); G02B 27/14 (2013.01); H04R 23/008 (2013.01); B81B 2201/0264 (2013.01); B81B 2201/047 (2013.01)] | 18 Claims |
1. An integrated optical transducer for detecting dynamic pressure changes, the transducer comprising:
a micro-electro-mechanical system, MEMS, die having a MEMS diaphragm with a first side exposed to the dynamic pressure changes and a second side; and
an application-specific integrated circuit, ASIC, die having an optical interferometer assembly comprising:
a beam splitting element for receiving a source beam from a light source and for splitting the source beam into a probe beam in a first beam path and a reference beam in a second beam path;
a beam combining element for combining the probe beam with the reference beam to a superposition beam; and
a detector configured to receive the superposition beam and to generate an electronic interference signal depending on the superposition beam;
wherein
the MEMS die is arranged with respect to the ASIC die such that a gap is formed between the second side of the diaphragm and the ASIC die, with the gap defining a cavity and having a gap height; and
the first beam path of the probe beam comprises coupling into the cavity, reflection off of a deflection point or a deflection surface of the diaphragm and coupling out of the cavity.
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