US 11,808,574 B2
Micromechanical detection structure of a MEMS multi-axis gyroscope, with reduced drifts of corresponding electrical parameters
Gabriele Gattere, Castronno (IT); Carlo Valzasina, Gessate (IT); and Luca Giuseppe Falorni, Limbiate (IT)
Assigned to STMICROELECTRONICS S.R.L., Agrate Brianza (IT)
Filed by STMICROELECTRONICS S.R.L., Agrate Brianza (IT)
Filed on Mar. 21, 2022, as Appl. No. 17/700,275.
Application 17/700,275 is a division of application No. 16/655,096, filed on Oct. 16, 2019, granted, now 11,313,681.
Application 16/655,096 is a division of application No. 15/273,312, filed on Sep. 22, 2016, granted, now 10,480,942, issued on Nov. 19, 2019.
Claims priority of application No. 102016000033203 (IT), filed on Mar. 31, 2016.
Prior Publication US 2022/0205784 A1, Jun. 30, 2022
Int. Cl. G01C 19/5747 (2012.01); G01C 19/5712 (2012.01); H01G 5/011 (2006.01); G01C 25/00 (2006.01); B81C 1/00 (2006.01); G01C 19/58 (2006.01)
CPC G01C 19/5747 (2013.01) [B81C 1/00158 (2013.01); G01C 19/5712 (2013.01); G01C 25/00 (2013.01); H01G 5/011 (2013.01); G01C 19/58 (2013.01); Y10T 29/49169 (2015.01)] 20 Claims
OG exemplary drawing
 
1. A device, comprising:
a substrate;
a first plurality of electrodes on the substrate;
a driven-mass that directly overlies the substrate;
a first through hole that extends through the driven-mass;
a first plurality of anchorage elements on the substrate, the first through hole directly overlies the first plurality of anchorage elements;
a plurality of rigid elements, the first through hole directly overlies the plurality of rigid elements;
a first plurality of elastic elements elastically coupling the plurality of rigid elements to the first plurality of anchorage elements; and
a second plurality of elastic elements elastically coupling the plurality of rigid elements to the driven-mass.