CPC G01C 19/5747 (2013.01) [B81C 1/00158 (2013.01); G01C 19/5712 (2013.01); G01C 25/00 (2013.01); H01G 5/011 (2013.01); G01C 19/58 (2013.01); Y10T 29/49169 (2015.01)] | 20 Claims |
1. A device, comprising:
a substrate;
a first plurality of electrodes on the substrate;
a driven-mass that directly overlies the substrate;
a first through hole that extends through the driven-mass;
a first plurality of anchorage elements on the substrate, the first through hole directly overlies the first plurality of anchorage elements;
a plurality of rigid elements, the first through hole directly overlies the plurality of rigid elements;
a first plurality of elastic elements elastically coupling the plurality of rigid elements to the first plurality of anchorage elements; and
a second plurality of elastic elements elastically coupling the plurality of rigid elements to the driven-mass.
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