US 11,808,573 B2
MEMS gyroscope with calibration of the scale factor in real time and calibration method thereof
Luca Guerinoni, Alzano Lombardo (IT); Luca Giuseppe Falorni, Limbiate (IT); and Matteo Fabio Brunetto, Legnano (IT)
Assigned to STMICROELECTRONICS S.R.L., Agrate Brianza (IT)
Filed by STMICROELECTRONICS S.R.L., Agrate Brianza (IT)
Filed on Apr. 25, 2022, as Appl. No. 17/728,635.
Application 17/728,635 is a continuation of application No. 16/898,339, filed on Jun. 10, 2020, granted, now 11,340,069.
Claims priority of application No. 102019000009582 (IT), filed on Jun. 20, 2019.
Prior Publication US 2022/0252397 A1, Aug. 11, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. G01C 19/5712 (2012.01); G01C 19/5755 (2012.01); G01C 19/574 (2012.01); B81B 3/00 (2006.01)
CPC G01C 19/5712 (2013.01) [B81B 3/0018 (2013.01); G01C 19/574 (2013.01); G01C 19/5755 (2013.01); B81B 2201/0242 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A gyroscope, comprising:
a substrate;
an anchoring element on the substrate;
a first mobile mass coupled to the anchoring element, including an opening, and configured to move in a first direction;
a first sensing structure including a sensing electrode underlying the opening in the first mobile mass, and a quadrature-injection electrode underlying the opening in the first mobile mass;
a second mobile mass coupled to the anchoring element, including an opening, aligned with the first mobile mass in the first direction, and configured to move in the first direction;
a second sensing structure including a sensing electrode underlying the opening in the second mobile mass, and a quadrature-injection electrode underlying the opening in the second mobile mass;
a third mobile mass coupled to the anchoring element, including a first opening and a plurality of second openings, and configured to move in a second direction transverse to the first direction;
a third sensing structure including a sensing electrode underlying the first opening in the third mobile mass, and a quadrature-injection electrode underlying the first opening in the third mobile mass;
a fourth sensing structure including a plurality of sensing electrodes aligned with a first set of the plurality of second openings in the third mobile mass, and a plurality of quadrature-injection electrodes aligned with a second set of the plurality of second openings in the third mobile mass;
a fourth mobile mass coupled to the anchoring element, including a first opening and a plurality of second openings, aligned with the third mobile mass in the second direction, and configured to move in the second direction,
a fifth sensing structure including a sensing electrode underlying the first opening in the fourth mobile mass, and a quadrature-injection electrode underlying the first opening in the fourth mobile mass; and
a sixth sensing structure including a plurality of sensing electrodes aligned with a first set of the plurality of second openings in the fourth mobile mass, and a plurality of quadrature-injection electrodes aligned with a second set of the plurality of second openings in the fourth mobile mass,
in a case where the first, second, third, and fourth mobile masses are in a rest position, the opening in the first mobile mass, the opening in the second mobile mass, the first opening in the third mobile mass, and the first opening in the fourth mobile mass directly overlie portions of the sensing electrodes and portions of the quadrature-injection electrodes of the first, second, third, and fifth sensing structures, respectively.