CPC G01C 19/5614 (2013.01) [G01C 19/5719 (2013.01); G01H 3/005 (2013.01); G01H 17/00 (2013.01); G01P 15/10 (2013.01); G01P 15/125 (2013.01); G01P 15/132 (2013.01); G01P 2015/0822 (2013.01)] | 9 Claims |
1. A vibration rectification error correction circuit comprising:
a frequency delta sigma modulation circuit, the frequency delta sigma modulation circuit being configured to:
receive a reference clock signal;
receive an original sensor signal from a sensor element, the sensor element being configured to measure a physical quantity corresponding to the original sensor signal; and
generate a modulated sensor signal based on the reference clock signal and the original sensor signal, a digital value of the modulated sensor signal corresponding to a number of signal edges of the reference clock signal in a most recent one cycle of the original sensor signal, and
a first connection circuit, the first correction circuit being configured to:
receive the modulated sensor signal having the digital value;
obtain a plurality of correction values, the plurality of correction values being set based on a property of the sensor element, the plurality of correction values being used for calculating a correction of a vibration rectification error of the original sensor signal;
subtract each value of the plurality of correction values from the digital value so as to obtain a plurality of subtracted values; and
multiply each value of the plurality of subtracted values so as to obtain a product as a corrected sensor signal in which the vibration rectification error of the original sensor signal has been corrected.
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