CPC C23C 14/042 (2013.01) [C23C 14/0682 (2013.01); C23C 14/08 (2013.01); H10K 71/166 (2023.02); H10K 71/231 (2023.02)] | 10 Claims |
1. A method of manufacturing a mask assembly, the method comprising:
preparing a mask substrate comprising a first layer, a second layer, and a third layer;
forming a first opening portion in the first layer;
arranging, on the first layer, a support substrate having a second opening portion connected to the first opening portion;
removing the third layer; and
removing the second layer.
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