US 11,807,933 B2
Apparatus for manufacturing display device, method of manufacturing mask assembly, and method of manufacturing display device
Wonje Cho, Yongin-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Apr. 14, 2021, as Appl. No. 17/230,867.
Claims priority of application No. 10-2020-0099937 (KR), filed on Aug. 10, 2020.
Prior Publication US 2022/0042159 A1, Feb. 10, 2022
Int. Cl. C23C 14/04 (2006.01); C23C 14/06 (2006.01); C23C 14/08 (2006.01); H10K 71/16 (2023.01); H10K 71/20 (2023.01)
CPC C23C 14/042 (2013.01) [C23C 14/0682 (2013.01); C23C 14/08 (2013.01); H10K 71/166 (2023.02); H10K 71/231 (2023.02)] 10 Claims
OG exemplary drawing
 
1. A method of manufacturing a mask assembly, the method comprising:
preparing a mask substrate comprising a first layer, a second layer, and a third layer;
forming a first opening portion in the first layer;
arranging, on the first layer, a support substrate having a second opening portion connected to the first opening portion;
removing the third layer; and
removing the second layer.