CPC C07F 11/00 (2013.01) [C23C 16/405 (2013.01); C23C 16/45553 (2013.01); H01L 21/0228 (2013.01); H01L 21/02175 (2013.01); H01L 21/02205 (2013.01)] | 2 Claims |
1. A tungsten compound comprising at least one selected from the group consisting of Compound No. 1 to No. 6, No. 9 to No. 14, No. 33 to No. 43, and No. 44:
wherein Me represents a methyl group, Et represents an ethyl group, nPr represents an n-propyl group, iPr represents an isopropyl group, nBu represents an n-butyl group, and tBu represents a tert-butyl group.
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