US 11,807,519 B2
Microelectromechanical membrane transducer with active damper
Domenico Giusti, Caponago (IT); and Fabio Quaglia, Pizzale (IT)
Assigned to STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed by STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed on Jun. 2, 2021, as Appl. No. 17/337,296.
Claims priority of application No. 102020000015073 (IT), filed on Jun. 23, 2020.
Prior Publication US 2021/0395075 A1, Dec. 23, 2021
Int. Cl. B81B 7/00 (2006.01); B81C 1/00 (2006.01); F16F 15/00 (2006.01)
CPC B81B 7/0016 (2013.01) [B81C 1/00825 (2013.01); F16F 15/007 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0307 (2013.01); B81B 2207/03 (2013.01); B81C 2203/032 (2013.01); F16F 2226/042 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A microelectromechanical membrane transducer, comprising:
a supporting structure;
a cavity in the supporting structure;
a membrane coupled to the supporting structure and covering a portion of the cavity;
a cantilever damper coupled to the supporting structure around a perimeter of the membrane and extending in a first direction towards a center of the membrane and at a distance in a second direction from the membrane, the second direction is transverse to the first direction, the cantilever damper is spaced apart from the membrane in the second direction in a resting position, and the cantilever damper is configured to, in operation, be deformed in the second direction away from the resting position towards the membrane and towards an active position of the cantilever damper in which the cantilever damper abuts the membrane; and
a damper piezoelectric actuator on the cantilever damper, the damper piezoelectric actuator is configured to, in operation, deform the cantilever damper from the resting position to the active position.