CPC B41J 2/1433 (2013.01) | 16 Claims |
1. An inkjet head comprising: a substrate having a nozzle hole; and a nozzle plate having a liquid repellent layer on an outermost surface of the substrate on an ink discharge surface side, wherein the nozzle plate has a conductive layer between the substrate and the liquid repellent layer;
wherein the nozzle plate has an underlayer between the conductive layer and the liquid repellent layer,
wherein the underlayer contains one or more kinds of metal elements selected from the group consisting of tantalum, zirconium, hafnium, niobium, titanium, tungsten, cobalt, molybdenum, vanadium, lanthanum, manganese, chromium, yttrium, praseodymium, ruthenium, rhodium, iridium, cerium, and aluminum, and contains one or more kinds of elements selected from the group consisting of oxygen, nitrogen, and carbon, and
wherein in a case that the underlayer contains hafnium, titanium or zirconium, oxygen is not selected from the group consisting of oxygen, nitrogen, and carbon.
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