US 11,806,827 B2
Method for manufacturing wire saw apparatus and wire saw apparatus
Yoshihiro Usami, Nishigo-mura (JP)
Assigned to SHIN-ETSU HANDOTAI CO., LTD., Tokyo (JP)
Appl. No. 16/086,554
Filed by SHIN-ETSU HANDOTAI CO., LTD., Tokyo (JP)
PCT Filed Feb. 24, 2017, PCT No. PCT/JP2017/006980
§ 371(c)(1), (2) Date Sep. 19, 2018,
PCT Pub. No. WO2017/183295, PCT Pub. Date Oct. 26, 2017.
Claims priority of application No. 2016-085208 (JP), filed on Apr. 21, 2016.
Prior Publication US 2019/0105750 A1, Apr. 11, 2019
Int. Cl. B24B 27/06 (2006.01); H01L 21/304 (2006.01); B28D 5/04 (2006.01); B24B 5/36 (2006.01); B24B 5/37 (2006.01); B65H 54/28 (2006.01); B65H 59/10 (2006.01)
CPC B24B 27/0633 (2013.01) [B24B 5/363 (2013.01); B24B 5/37 (2013.01); B24B 27/06 (2013.01); B28D 5/04 (2013.01); B28D 5/045 (2013.01); H01L 21/304 (2013.01); B65H 54/28 (2013.01); B65H 59/10 (2013.01); B65H 2701/36 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A method for manufacturing a wire saw apparatus, the method comprising the steps of:
providing a wire saw apparatus including:
a wire supply reel from which a wire extends;
a long roller having a surface on which the wire extending from the wire supply reel can pass;
a plurality of wire guides around which the wire is spirally wound;
a wire winding reel which winds the wire; and
a tension arm which is arranged between the wire supply reel and the wire guides, controlled to move within a control angle of ±A (°) set in advance, and configured to apply tension to the wire,
wherein the wire is configured to pass on the long roller while moving in an axial direction of the long roller;
measuring a surface roughness Rmax of the long roller;
measuring an angle a (°) of the tension arm at which the tension arm swings outside a range of the control angle set in advance while the wire is extending from the wire supply reel;
calculating R1×2×A÷(|a|+A)=R2, where R1 (μm) represents the measured surface roughness Rmax of the long roller; and
adjusting the surface roughness Rmax of the long roller to the calculated numerical value R2 or less.