CPC B08B 9/093 (2013.01) | 14 Claims |
1. A substrate processing apparatus comprising:
a spraying unit installed in an inner space of a chamber member in which a substrate is processed, configured to spray a cleaning liquid into the inner space of the chamber member so as to clean devices for discharging a chemical liquid to the substrate and then collecting the chemical liquid, and configured to spray a drying gas for drying the remaining cleaning liquid into the inner space of the chamber member;
a management unit configured to remove a residue remaining on the spraying unit; and
a controller configured to control the spraying unit and the management unit.
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