| US 7,615,985 B2 | ||
| Probe for measuring characteristics of an excitation current of a plasma, and associated plasma reactor | ||
| Sébastien Dine, Paris (France); Jacques Jolly, Verrieres le Buisson (France); and Jean Bernard Pierre Larour, Viroflay (France) | ||
| Assigned to Ecole Polytechnique, Palaiseau (France); and Centre National de la Recherche Scientifique (CNRS), Paris (France) | ||
| Appl. No. 11/663,129 PCT Filed Sep. 15, 2005, PCT No. PCT/EP2005/054599 § 371(c)(1), (2), (4) Date Mar. 16, 2007, PCT Pub. No. WO2006/030024, PCT Pub. Date Mar. 23, 2006. |
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| Claims priority of application No. 04 09811 (FR), filed on Sep. 16, 2004. | ||
| Prior Publication US 2007/0252580 A1, Nov. 01, 2007 | ||
| Int. Cl. G01R 31/02 (2006.01); G01R 1/06 (2006.01) | ||
| U.S. Cl. 324—72.5 [324/149] | 13 Claims |
| 1. A probe for measuring electrical characteristics of an excitation current of a plasma, said probe comprising a current
sensor and a voltage sensor, said probe being mounted on a conducting line which includes an inner conductor and an outer
conductor, wherein the current sensor comprises:
a groove formed in a mass of one of the conductors to form a diversion for current traversing the conductor, and
a point for measuring the electrical voltage between an earth or a ground connected to the conductor and a point on the groove,
the current sensor measuring a voltage proportional to a first temporal derivative of the excitation current, and
the voltage sensor is a derivative sensor, measuring a voltage proportional to a first temporal derivative of the excitation
current voltage.
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