| US 7,615,926 B2 | ||
| Low voltage microcavity plasma device and addressable arrays | ||
| J. Gary Eden, Mahomet, Ill. (US); Sung-Jin Park, Champaign, Ill. (US); Paul A. Tchertchian, Urbana, Ill. (US); and Seung Hoon Sung, Urbana, Ill. (US) | ||
| Assigned to The Board of Trustees of the University of Illinois, Urbana, Ill. (US) | ||
| Filed on Jun. 12, 2007, as Appl. No. 11/811,892. | ||
| Claims priority of provisional application 60/812755, filed on Jun. 12, 2006. | ||
| Prior Publication US 2008/0129185 A1, Jun. 05, 2008 | ||
| Int. Cl. H01J 17/49 (2006.01) | ||
| U.S. Cl. 313—582 | 38 Claims |
| 1. A microcavity plasma device, the device comprising:
a substrate having a microcavity formed therein;
first and second electrodes disposed to excite a plasma in said microcavity upon application of application of a time-varying
potential between the first and second electrodes;
dielectric isolating said first and second electrodes from a plasma formed in said microcavity; and
a trigger electrode disposed proximate said microcavity.
|