| US 7,615,748 B2 | ||
| Outgassing rate detection | ||
| Steven R. Walther, Andover, Mass. (US); and Harold M. Persing, Westbrook, Me. (US) | ||
| Assigned to Varian Semiconductor Equipment Associates, Inc., Gloucester, Mass. (US) | ||
| Filed on Sep. 25, 2007, as Appl. No. 11/860,696. | ||
| Prior Publication US 2009/0078871 A1, Mar. 26, 2009 | ||
| Int. Cl. G01J 5/10 (2006.01) | ||
| U.S. Cl. 250—338.1 | 15 Claims |
| 1. A workpiece processing system comprising:
a platen configured to support a workpiece;
a source configured to provide an electromagnetic wave proximate a front surface of the workpiece;
a detector configured to receive at least a portion of the electromagnetic wave and provide a detection signal representative
of an outgassing rate from the workpiece of outgassing byproducts; and
a controller configured to receive the detection signal and compare an intensity of the received electromagnetic wave with
a nominal intensity, wherein a reduction from the nominal intensity is representative of the outgassing rate.
|