US 7,615,406 B2
Electronic device package manufacturing method and electronic device package
Kazushi Higashi, Osaka (Japan); and Yukihiro Maegawa, Osaka (Japan)
Assigned to Panasonic Corporation, Osaka (Japan)
Appl. No. 11/883,166
PCT Filed Jan. 26, 2006, PCT No. PCT/JP2006/001209
§ 371(c)(1), (2), (4) Date Jul. 27, 2007,
PCT Pub. No. WO2006/080388, PCT Pub. Date Aug. 03, 2006.
Claims priority of application No. 2005-020710 (JP), filed on Jan. 28, 2005.
Prior Publication US 2008/0277771 A1, Nov. 13, 2008
Int. Cl. H01L 21/00 (2006.01)
U.S. Cl. 438—106  [438/115; 438/667; 257/693; 257/690; 257/698; 257/E23.011; 257/E23.067] 14 Claims
OG exemplary drawing
 
1. An electronic device package manufacturing method comprising:
joining a first member with a second member via a plurality of internal electrodes such that an electronic device connected to the plurality of internal electrodes is placed between the first member and the second member;
forming through holes between a surface of the second member that is opposite from a joint surface of the second member that is joined with the first member via the plurality of internal electrodes and joint surfaces of the plurality of internal electrodes at the second member; and
placing a conductive material in the through holes so as to be connected to the plurality of internal electrodes, to form a plurality of external electrodes on the surface of the second member that is opposite from the joint surface of the second member,
wherein, by joining (i) one of the first member and the second member that has an annular metal projection portion on a joint surface thereof that is joined with another of the first member and the second member via the plurality of internal electrodes, and (ii) the another of the first member and the second member that has an annular metal joining portion thereon that corresponds to the annular metal projection portion on the joint surface of the one of the first member and the second member, via the plurality of internal electrodes under a depressurized environment, such that the annular metal projection portion and the annular metal joining portion are metallically joined together by a metal joining at a normal temperature, the plurality internal electrodes and the electronic device are placed between the first member and the second member, forming a depressurized sealed space of an annular metal wall portion formed from the annular metal projection portion and the annular metal joining portion.